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Simulation Software & Services for Electronics

Semiconductor Manufacturing

fea softwareANSYS FEA and CFD simulation software has been used extensively in the design and engineering of semiconductor manufacturing. A number of SimuTech customers are using ANSYS FEA and CFD software for semiconductor manufacturing projects.

SimuTech Consulting Projects in the Semiconductor Manufacturing Electronics Industry:

  • Semiconductor wafer wet cleaning processes
  • Semiconductor Spin Coating: transient thickness vs radius for various wafer sizes as well as RPMs
  • CVD (Chemical Vapor Deposition): chamber modeling for deposition uniformity, thickness, and optimization to improve yields and decrease processing time

ANSYS consulting

ChallengesSimulation Benefits
  • Improving film thickness across a wafer and from wafer to wafer
  • Thermomechanical stress on the wafer
  • Etching uniformity
  • Improving pre-thermal and post-strip wafer cleans
  • Reproducible, void-free copper filling
  • Facilitates innovation in new equipment and manufacturing processes design
  • Allows for realistic multiphysics simulations 
  • Allows optimization of semiconductor manufacturing processes
  • Reduces development cost and time to market