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Semiconductor Manufacturing |
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ANSYS FEA and CFD simulation software has been used extensively in the design and engineering of semiconductor manufacturing. A number of SimuTech customers are using ANSYS FEA and CFD software for semiconductor manufacturing projects.
SimuTech Consulting Projects in the Semiconductor Manufacturing Electronics Industry:
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Semiconductor wafer wet cleaning processes
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Semiconductor Spin Coating: transient thickness vs radius for various wafer sizes as well as RPMs
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CVD (Chemical Vapor Deposition): chamber modeling for deposition uniformity, thickness, and optimization to improve yields and decrease processing time

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Challenges |
Simulation Benefits |
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Improving film thickness across a wafer and from wafer to wafer
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Thermomechanical stress on the wafer
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Etching uniformity
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Improving pre-thermal and post-strip wafer cleans
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Reproducible, void free copper filling
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Facilitates innovation in new equipment and manufacturing processes design
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Allows for realistic multiphysics simulations
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Allows optimization of semiconductor manufacturing processes
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Reduces development cost and time to market
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